UIllinois ECE Title Bar ece444
Theory and Fabrication of Integrated Circuits
University of Illinois at Urbana-Champaign logo
Skip Navigation Linksece444 Home > Lab > GT > GT8: SiO2 Equations
HOME · LECTURE · LAB · GT · CALCULATORS · Text Only
 
Lab photo

GT8 · Oxide growth calculation (Grove’s Model)



Grove's model - time calculation and Grove's model - tau calculation,

Grove's model - B calculation and Grove's model - B/A calculation

Where T is in Kelvin

Coefficients for Grove's Model

Note: the coefficients given below are for (111) oriented wafers. To solve the Deal-Grove model for oxidation of a (100) wafer, divide C2 by 1.68 (Anner, p.594).

C1 (cm2/s) C2 (cm/s) b1 (K) b2 (K)
Dry 2.144 x 10-9 0.173 1.427 x 104 2.320 x 104
Wet 5.940 x 10-10 2.490 8.237 x 103 2.320 x 104
Steam 1.070 x 10-9 4.530 9.049 x 103 2.378 x 104

SiO2 Diffusion Coefficient Calculation

Diffusant A* B* D@1200°C
H2 3.02 3490 4 x 10-6cm2/s
He 6.57 1050 5 x 10-8
H2O 2 x 10-9
O2 3 x 10-8
Al 2 x 10-11
Ga 4 x 10-12
Sb 2 x 10-14
P (open tube, P2O5) 3 x 10-15
B 3.55 15400 (T<1100°C) 2.5 x 10-16
10.24 6300 (T>1100°C)

 

General Equation for Calculation of Diffusion Coefficient Relative dielectric constant SiO2 atomic concentration (cm-3) Sources

Diffusion coefficient calculation
T in Kelvin
A & B from above

εr = 3.9 2.3 x 1022

Burger and Donovan, Vol. 1
Grove
Ghandi

Graphs and Tables

GT1 · N vs ρ

GT2 · 4PP Correction a

GT3 · 4PP Correction k

GT4 · Dry Oxidation

GT5 · Wet Oxidation

GT6 · Steam Oxidation

GT7 · Oxide Color Chart

GT8 · SiO2 Equations

GT9 · Trumbore Curves

GT10 · Si Diffusivity Data

GT11 · Goldsmith Curves

GT13 · erfc Table

GT14 · erf Properties

GT15 · Ion Implant Ranges

GT16 · BV for Diffused Junctions

GT19 · Physical Constants

GT20 · Vapor Pressure Curves

GT21 · Herman Mask Set

 

References

Data sheets



Answers provided by this service may not be relevant to the materials presented in this website.

Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

Contact ece444
Copyright ©2014 The Board of Trustees at the University of Illinois. All rights reserved.

archives: ©1999 ©2000 ©2004 ©2005 ©2006