UIUC ECE Title Bar ece444
Theory and Fabrication of Integrated Circuits
University of Illinois at Urbana-Champaign logo
Skip Navigation Linksece444 Home > Lab > Lab Manuals
HOME · LECTURE · LAB · GT · CALCULATORS · Text Only
  LAB HOME · SAFETY · CLASS TIMES · DEVICES · EQUIPMENT · MANUALS

Laboratory Manuals

The laboratory uses two printed manuals for processing.

Lab Manual

The lab manual includes introductory material for the lab and the process recipe.

Lab Supplement

The lab supplement includes safety information, detailed equipment/process instructions, the mask set, and general process information.

Adobe Acrobat Reader Link

Link will open in new window Download Adobe Reader to view the files.

Link will open in new window Links will open in a new window.


Answers provided by this service may not be relevant to the materials presented in this website.

Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

Contact ece444
Copyright © 2007, 2008, 2009 The Board of Trustees at the University of Illinois. All rights reserved.

archives: ©1999 ©2000 ©2004 ©2005 ©2006