UIllinois ECE Title Bar ece444
Theory and Fabrication of Integrated Circuits
University of Illinois at Urbana-Champaign logo
Skip Navigation Linksece444 Home > Calculators > GROVE.net
HOME · LECTURE · LAB · GT · CALCULATORS · Text Only
  DIFCAD · erfc · GROVE · IRVIN


Oxidation Conditions
Orientation:
Oxidation Type:


x0 (Å):
Temp (°C):
Time (min):
 
Calculated tox: 0 Å

GROVE.net

Input oxidation parameters into the calculator to the left. Press Add Step to insert the oxidation step. Press Clear to remove all steps.

To remove individual oxidation steps, highlight the appropriate step in the window at the bottom of the calculator to the left, then press Delete Step.

A visual representation of the oxide film on the silicon wafer will be presented in the area of this text when Add Step is pressed, with an approximation to the color of the film, and display of the actual calculated thickness.

About Grove.net

Grove.net is a utility for calculating oxide thickness (based on Deal and Grove's model) from user input parameters.

The engine is based on the original Grove Windows executable written by Michael Arnold.


Answers provided by this service may not be relevant to the materials presented in this website.

Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

Contact ece444
Copyright ©2017 The Board of Trustees at the University of Illinois. All rights reserved.