Warning! This is the archived 1999 Fabweb site! Here is the latest site
ECE 344 Diffusion Furnace Temperature Setting Form
TAs use this form to change the furnace settings. It really works!
Jim Buszkiewicz did the hardware and software for the PC which controls
the diffusion furnaces and accepts password protected commands over the
internet. This form "talks" to his project. Thanks Jim!
(If it asks to save a file, just press CANCEL.)
Note that actual setpoints for calibrated furnace temperatures are always
20 or so degrees higher because the temperature sensors used for control
are closer to the heating elements than the wafers.
If there is no response in 5 seconds or so, then the PC is probably off-line.
Other related screens:
(The lastest calibration set points will be kept in the Log File.)
I like to edit this file with the command:
vuepad /ece344/Equipment/Furnaces/Diffusion/Temp.Set.html &
This screen was created by
Mike Fitzimmons - U of Illinois ECE Dept. - mikef@uiuc.edu,
and is maintained by
Kevin Beernink - U of Illinois ECE Dept. - beernink@uiuc.edu
E-mail comments and suggestions to ece344@uiuc.edu or use the
FEEDBACK FORM.
Warning! This is the archived 1999 Fabweb site! Here is the latest site