EE 344 LAB SHUTDOWN PROCEDURES
These procedures are meant to be a reminder to instructors, researchers, and
special project students new to the facilities. They are NOT a substitute for being
shown how to carry them out, but occasionally it helps for students to have the
information contained here. Locations are indicated on the lab map at the end of
this appendix.
SHUTDOWN CONFIGURATION:
The following tasks can and should be performed as soon as possible (after
students are done)
Aligners:
- Check for masks left loaded.
- Power - OFF
- UV power - OFF
- IF not needed for testing, THEN turn OFF House Vacuum pump ASAP
Furnaces:
-
Set furnaces to standby temperature. For analog controllers 200 = 600°C.
(Leave Anneal Furnace alone).
- Flow controllers OFF and in MANUAL.
- Boats - IN
- End caps - ON
- Fan & Light - OFF
- IF not needed for > 1 week, THEN trip the breakers on the sides and shut off the
H2 and O2 tank valves.
Fume Hoods:
- Hotplates - OFF
- Clean up PR spinner and bowl.
- IF LAST LAB OF WEEK, THEN
- empty and clean the PR syringe
(e-mail the Monday TA how much remained)
- switch developer bottle with DI bottle
- clean developer sprayer and area with DI.
- drain all acids (as appropriate) and rinse containers
- prop up the labware to dry.
- spray and wipe down acid hood surfaces (use the drying wipes)
END IF
- Degreaser - OFF, lid in place.
- Check that the lids are on the chemical containers.
- Pour waste acetone and IPA into bottle.
- Storage doors closed and bottles inside.
- Lights OFF on Spinner and Degreaser Hoods.
- IF RCA CLEAN PERFORMED THEN
- dump SC-1 solution with lots of water
- Pour SC-2 solution into waste tank.
END IF
Rinser/Dryer - OFF
Cooke systems: SHUT DOWN as per Appendix A instructions.
Plasma Asher:
- Power - OFF
- Pump - OFF
- Chamber - closed
Hot point probes - OFF
point probes - OFF
Junction grinder POWER - OFF
Nitrogen and compressed air - OFF (except at furnaces)
Microscope lights - OFF
HP CPUs ON, Monitors OFF
All test equipment and PCs- OFF
Storage cabinet (to right of the safety shelf) - LOCKED
IF MONDAY LAB AND THERE ARE FULL WASTE CONTAINERS,
THEN
- take containers to drop off point in 50G and call CHEM. PICK UP (3-9278)
END IF
CLEAN UP MISCELLANEOUS DEBRIS.
Take out full trash bags and replace.
Record any ideas for improving this lab manual by writing in Lab Copy.
Students - OUT
Lights - OUT (don't forget the wet lab room lights).
If there is more than a single empty solvent bottle in the chase, take the extras out
to the recycling bins.
In the chases turn OFF the following:
- House Vacuum pump (HV1)
- Fume hood power main breaker (FB1)
- All gas and water (including DI) valves EXCEPT
- the annealing furnace
- the Cooke 301 air and water if D-pump not cool
- the degreaser water if its not cool (power off for 20 min.)
- valves labeled LEAVE ON
- Solvent fume hood exhaust iff degreaser is cool (power off for 20 min.)
- IF Acid Exhaust was used, THEN (in this order)
- Turn OFF the make-up air handler in 50G
- Turn OFF the acid exhaust fan
- Turn OFF the static air pressure control valve - do not adjust regulator.
- Chase lights
Student storage bins locked
Outer room lights OFF
I like to edit this file with the command:
vuepad /ece344/Facilities/Shutdown.html &
Written by
Mike Fitzsimmons - U of Illinois ECE Dept. - mikef@uiuc.edu
E-mail comments and suggestions to ece344@uiuc.edu or use the
FEEDBACK FORM.
Warning! This is the archived 1999 Fabweb site! Here is the latest site