EE 344 LAB STANDBY CONFIGURATION
These procedures are meant to be a reminder to instructors, researchers, and
special project students new to the facilities. They are NOT a substitute for
being
shown how to carry them out, but occasionally it helps for students to have the
information contained here. Locations are indicated on the lab map at the end of
this appendix.
STANDBY CONFIGURATION:
Aligners:
- Check to be sure that no masks were left loaded.
- Power - OFF
- UV power - LEAVE ON
Furnaces:
- Leave at operation temperature.
- Only Nitrogen hould be flowing.
- Boats - IN
- End caps - ON
- Fan & Light - OFF
Fume Hoods:
- Clean up PR spinner and bowl.
- Degreaser - OFF
- Check that the lids are on the chemical containers.
- Pour waste acetone and IPA into bottle.
- Storage doors closed and bottles inside.
- Lights OFF on Spinner and Degreaser Hoods.
- IF THE RCA CLEAN WAS PERFORMED, THEN
- dump the SC-1 solution with lots of water
- Pour the SC-2 solution into waste tank.
Rinser/Dryer - OFF
Plasma Asher:
- Power - OFF
- Pump - OFF
- Chamber - closed
CVE 301 Vacuum System:
- Switched to manual
- Bell jar roughed out
- HiVac - CLOSED
- Foreline - OPEN
- Mechanical pump - ON
- pump - ON
- H2O - ON
Hot point probes - OFF
4 point probe - LEAVE ON
All test equipment and computer monitors - OFF
Storage cabinet (to right of the safety shelf) - LOCKED
Clean up miscellaneous debris.
Take out filled trash bags and replace.
In the chases, turn OFF the following:
- House Vacuum pump (HV1)
- Fume hood power main breaker (FB1)
- All gas and water valves EXCEPT
- the annealing furnace
- the Cooke 301 air and water if the Diffusion pump is not cool
- the degreaser water if it's not cool (power off for 20 min.)
- valves labeled LEAVE ON
- Chase lights
Student storage bins locked
Outer room lights OFF
Students - OUT
This screen was created by
Mike Fitzimmons - U of Illinois ECE Dept. - mikef@uiuc.edu,
and is maintained by
Kevin Beernink - U of Illinois ECE Dept. - beernink@uiuc.edu
E-mail comments and suggestions to ece344@uiuc.edu or use the
FEEDBACK FORM.
Facilities/Standby.html updated 20-May 1996
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