Warning! This is the archived 1999 Fabweb site! Here is the latest site

ACID HOOD USE


  1. PLACE WAFER(S) IN A POLYPROPYLENE WAFER CASSETTE
  2. TURN ON THE RIGHT HAND FAUCET
  3. PUT ON A PAIR OF HEAVY GLOVES
  4. ARRANGE THE ACID(S) AND RINSES
  5. WHILE FIRMLY HOLDING THE ACID CONTAINER WITH PALMS, USE INDEX FINGERS AND THUMBS TO SLOWLY RAISE THE FAR SIDE OF THE LID.
  6. PLACE ALL THE LIDS UPSIDE DOWN IN POSITIONS THAT KEEP THEM CLEAN AND EASY TO PICK UP.
  7. MOVE THE FIRST RINSE TANK(S) ALONG SIDE THE CORRESPONDING ACID TUB(S).
  8. GRIP WAFER CASSETTE HANDLE SUCH THAT DRIPS FROM THE GLOVE ARE UNLIKELY TO LAND ON THE WAFERS.
  9. SLOWLY IMMERSE THE WAFERS IN THE ACID AND BEGIN TIMING. ROTATE THE WAFERS SLOWLY BACK AND FORTH. DO NOT EVEN COME CLOSE TO SPLASHING!
  10. WHEN THE ETCH TIME HAS ELAPSED, TILT THE WAFER CASSETTE AND THEN SLOWLY RAISE IT OUT OF THE ACID.
  11. ALLOW FOR MOST OF THE ACID TO DRIP OFF FOR A FEW SECONDS, THEN QUENCH IN THE FIRST RINSE.
  12. AFTER AGITATING FOR 5-10 SECONDS, TRANSFER TO THE FINAL RINSE TANK FOR 20-30 SECONDS.
  13. RINSE A GLOVE UNDER THE FAUCET AND USE IT TO SPRAY THE WAFER CASSETTE WITH FRESH D.I. OVER THE SINK.
  14. IF NO OTHER ETCHES ARE NEEDED, SET THE WAFER CASSETTE ON A GLASS PLATE AND ONLY ON A GLASS PLATE.
  15. REPLACE THE LIDS AND SLOWLY PUSH THE TUBS TO THE BACK OF THE FUME HOOD.
  16. RINSE THE HEAVY GLOVES UNDER THE RUNNING FAUCET, TAKE THEM OFF AND LEAVE THEM TO DRY ON THE COUNTER.
  17. IF ACID DROPS ARE SUSPECTED, GENTLY SPRAY WITH D.I. AND N2 DRY OR ASK THE INSTRUCTOR FOR ASSISTANCE.
  18. TURN OFF THE FAUCET.

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Written by Dane Sievers - U of Illinois ECE Dept. - dsievers@eceuil.ece.uiuc.edu with inspiration from Mike Fitzsimmons
E-mail comments and suggestions to ece344@uiuc.edu or use the FEEDBACK FORM.

Warning! This is the archived 1999 Fabweb site! Here is the latest site