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ACID HOOD USE
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PLACE WAFER(S) IN A POLYPROPYLENE WAFER CASSETTE
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TURN ON THE RIGHT HAND FAUCET
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PUT ON A PAIR OF HEAVY GLOVES
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ARRANGE THE ACID(S) AND RINSES
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WHILE FIRMLY HOLDING THE ACID CONTAINER WITH
PALMS, USE INDEX FINGERS AND THUMBS TO SLOWLY RAISE THE FAR SIDE OF THE
LID.
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PLACE ALL THE LIDS UPSIDE DOWN IN POSITIONS
THAT KEEP THEM CLEAN AND EASY TO PICK UP.
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MOVE THE FIRST RINSE TANK(S) ALONG SIDE THE
CORRESPONDING ACID TUB(S).
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GRIP WAFER CASSETTE HANDLE SUCH THAT DRIPS
FROM THE GLOVE ARE UNLIKELY TO LAND ON THE WAFERS.
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SLOWLY IMMERSE THE WAFERS IN THE ACID AND BEGIN
TIMING. ROTATE THE WAFERS SLOWLY BACK AND FORTH. DO NOT EVEN COME CLOSE
TO SPLASHING!
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WHEN THE ETCH TIME HAS ELAPSED, TILT THE WAFER
CASSETTE AND THEN SLOWLY RAISE IT OUT OF THE ACID.
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ALLOW FOR MOST OF THE ACID TO DRIP OFF FOR
A FEW SECONDS, THEN QUENCH IN THE FIRST RINSE.
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AFTER AGITATING FOR 5-10 SECONDS, TRANSFER
TO THE FINAL RINSE TANK FOR 20-30 SECONDS.
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RINSE A GLOVE UNDER THE FAUCET AND USE IT TO
SPRAY THE WAFER CASSETTE WITH FRESH D.I. OVER THE SINK.
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IF NO OTHER ETCHES ARE NEEDED, SET THE WAFER
CASSETTE ON A GLASS PLATE AND ONLY ON A GLASS PLATE.
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REPLACE THE LIDS AND SLOWLY PUSH THE TUBS TO
THE BACK OF THE FUME HOOD.
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RINSE THE HEAVY GLOVES UNDER THE RUNNING FAUCET,
TAKE THEM OFF AND LEAVE THEM TO DRY ON THE COUNTER.
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IF ACID DROPS ARE SUSPECTED, GENTLY SPRAY WITH
D.I. AND N2 DRY OR ASK THE INSTRUCTOR FOR ASSISTANCE.
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TURN OFF THE FAUCET.
Written by Dane Sievers - U of Illinois ECE
Dept. - dsievers@eceuil.ece.uiuc.edu with inspiration from Mike Fitzsimmons
E-mail comments and suggestions to ece344@uiuc.edu
or use the FEEDBACK
FORM.