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Student Preparations for Lab
The ECE 344 lab grade has to be closely correlated to your preparedness
in order to serve as motivation since the health of yourself,
the other students, and the equipment depend upon your competence.
The following schedule and related links will help you to be prepared.
- MEETING 1 - Yes, the LAB DOES MEET THE FIRST WEEK!!!!! (If
you miss it, attend another lab section
and contact your lab instructor.)
- The instructor will touch on the following in lab, but the
following screens contain more detail.
- MEETING 2 - First week of Processing.
- Be prepared by reading the screens and doing the prelab for
your group BEFORE class.
- Group 1
- Group 2
- IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K.
It will become filler work for later on when you have to wait
during a furnace operation or when it's too late in the lab period
to start a PR process.
- Group 3
- MEETING 3
-
- Group 1
- Group 2
- Group 3
- IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K.
It will become filler work for later on when you have to wait
during a furnace operation or when it's too late in the lab period
to start a PR process.
- MEETING 4
-
- Group 1
- IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K.
It will become filler work for later on when you have to wait
during a furnace operation or when it's too late in the lab period
to start a PR process.
- Group 2
- Group 3
- MEETING 5
- No more groups. Now everyone should be on their own and it's
first come first serve for the equipment. You may arrive up to
a half hour early from now on.
- Probable starting point is at Boron Predep.
- Probable ending point is before Photoresist # 2.
- Be sure to "submit" your
logsheet file within 24 hours of gathering new process data from
now on.
- MEETING 6
- Probable starting point is at Photoresist # 2.
- Probable ending point is before Photoresist # 3.
- Be sure to "submit" your
logsheet file within 24 hours of gathering new process data.
- MEETING 7
- The report for the IC-CAP Tutorial will probably be due this
week. Be sure to"submit" the
model file from your ICCAP tutorial before class.
- MEETING 8
-
- MEETING 9
- The Processing Report will probably be due this week.
-
- Be ready to use ICCAP to test your IC wafer!
- MEETING 10
- Since there are only 5 test stations, the first 5 students
will get them. Anyone else who finishes processing, should go
the Engineering Workstation Lab and learn more about IC-CAP. Many
of the plots called for in the final report can be prepared in
large part ahead of time.
- MEETING 11
- Continue testing the IC wafer. If you don't get a test station,
let your instructor know so you can definitely get one next week.
- MEETING 12
- Continue testing the IC wafer. If you don't get a test station,
let your instructor know so you can definitely get one next week.
-
- Have you finished the ellipsometer measurements of all the oxide thicknesses yet?
- MEETING 13
- Continue testing the IC wafer. If everyone has finished testing
the basic device types, we'll begin a round of testing on a selection
of the other structures. Check the newsgroup for
the latest information.
- MEETING 14
- Continue testing the IC wafer.
- MEETING 15
- Finish testing and "submit" your logsheet and ICCAP
files. The electronic files will usually be due before the written
report, but your instructor will announce the due dates.
- MEETING 16 - Finals week.
- A laboratory oriented exam will be administered at the time
and place scheduled for the lecture section(s) final exam. Everything
in the lab manual will be fair game. The exam will determine who
knew what they were doing in the lab and why.
This screen was created by Mike Fitzimmons
- U of Illinois ECE Dept. - mikef@uiuc.edu,
and is maintained by Kevin Beernink
- U of Illinois ECE Dept. - beernink@uiuc.edu
E-mail comments and suggestions to ece344@uiuc.edu or use the
FEEDBACK FORM.
preparations.html updated 05/14/96