Wet Lab Procedures

How to etch with out etching yourself...
  • Always wear a closed face shield inside the wet lab (You may take it off when using the microscopes, just remember to put the face shield back on when finished).
  • Whenever working with chemicals work under the appropriate fume hood. Most of the chemicals in the lab are volatile.
  • Always wear the Nitrile gloves (thick green gloves) when working in the acid or RCA hoods.

    BE ESPECIALLY CAREFUL WITH THE NITRILE GLOVES:
    • Never touch the outside of the gloves.
    • Students are usually careful when getting in and out of the gloves, however some students tend to be careless while using the gloves.
      • Never touch your face with the gloves, if your face / nose itches don't use your gloved hands to scratch
      • Always be aware of BOTH hands. Always keep both hands above the counter. Don't let your left hand (if you are right handed for example) out of your sight, you will tend to put it by your left hip. Remember: TYVEK and LATEX will NOT PROTECT YOU FROM CHEMICALS.
    • If you see or feel anything wet inside the gloves let one of the TAs know, we have plenty of new gloves


  • When handling chemicals for the RCA clean be careful when you get them in and out of the cabinets underneath the hoods. When you are done with the bottles and other equipment remember to rinse them before returning them to their storage place. Always open the containers underneath the hood: some of them will give off fumes as you open them.
  • When using the sulfuric acid in SC-2 remember your jingle, "Always do as you oughta, add ACID to WATER". When working with acids and water, water always goes first.
    • When you add the sulfuric acid to the solution you will notice a sharp increase in temperature.
    • If you pour too fast, or to a solution that is already too hot (above 60° C) you will reach (at least locally) the boiling point of the solution. This will cause bubbling and splashing of acid outside the quartz boat.
    • If this happens stop pouring acid immediately, turn the temperature controller off and wait for the temperature to go below 60° C before you continue to pour the acid.


Copyright© 2000, 2001
ECE344: Theory and Fabrication of Integrated Circuits
Electrical and Computer Engineering Department
University of Illinois - Urbana/Champaign

webmaster