CHEMICALS USED IN ECE344

Below is a listing of the chemicals used in the laboratory.

• H₂SO₄ - sulfuric acid
• HNO₃ - nitric acid
• HF - hydrofluoric acid
• H₃PO₄ - ortho-phosphoric acid
• NH₄OH - ammonium hydroxide
• NH₄F - ammonium fluoride
• H₂O₂ - hydrogen peroxide
• HMDS - hexamethyldisilazane
• (CH₃)₂CO - Acetone
• IPA - isopropyl alcohol
• PR - AZ5214 photoresist
• Developer - AZ327MIF: TmAH - tetramethylammonium hydroxide

You can find information about the chemicals used in the lab with the MSDS (Material Safety Data Sheet) stored in the file cabinet.

What is an MSDS? Check out Interactive Learning Paradigms, Inc. page about MSDSs.

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Copyright© 2000, 2001
ECE344: Theory and Fabrication of Integrated Circuits
Electrical and Computer Engineering Department
University of Illinois - Urbana/Champaign

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