Warning! This is an archived version of the 2005 site.
ECE444: Theory and Fabrication of Integrated Circuits
Main
|
Lecture
|
Lab
|
Recipe
|
Testing
|
Logsheets
†
|
GT Section
|
Utilities
|
Administration
†
Graphs and Tables
|
Irvin Curves
|
Data Sheets
|
Animations
|
Equations
|
Process Overview
|
References
† authentication required
GT SECTION: EQUATIONS
Chemical Vapor Deposition
Predeposition Diffusion
Drive Diffusion
Junctions
Four Point Probe
Ion Implantation
Oxidation
Phase Diagrams
Photolithography
Processing Equations
© 2004, 2005: ECE444
Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign
comments