Warning! This is an archived version of the 2005 site.
ECE444: Theory and Fabrication of Integrated Circuits
Main
|
Lecture
|
Lab
|
Recipe
|
Testing
|
Logsheets
†
|
GT Section
|
Utilities
|
Administration
†
Graphs and Tables
|
Irvin Curves
|
Data Sheets
|
Animations
|
Equations
|
Process Overview
|
References
† authentication required
GT SECTION: GRAPHS AND TABLES
GT-1: N v. ρ
GT-2: 4pp Correction a
GT-3: 4pp Correction k
GT-4: Dry Oxidation
GT-5: Wet Oxidation
GT-6: Steam Oxidation
GT-7: Oxide Color Chart
GT-8: SiO
2
Properties
GT-9: Trumbore Curves
GT-10: Diffusivity Data
GT-11: Goldsmith Curves
GT-13:
erfc
Table
GT-14: Properties of
erf
GT-15: Ion Implant Range Data
GT-16: BV for Diffused Junctions
GT-19: Physical Constants
GT-20: Vapor Pressure Curves
GT-21: Herman Mask Set
Graphs and Tables
© 2004, 2005: ECE444
Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign
comments