ECE444 Recipe: Electrical Testing

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ECE444: Theory and Fabrication of Integrated Circuits

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RECIPE:

	1: RCA Clean
	2: Initial Oxidation
	3: Photolith Level 1
	4: Level 1 Etch
	5: Level 1 PR Removal
	6: Boron Predep
	7: BSG Etch
	8: Boron Drive
	9: Photolith Level 2
	10: Level 2 Etch
	11: Level 2 PR Removal
	12: Phophorus Predep
	13: PSG Etch
	14: Photolith Level 3
	15: Level 3 Etch
	16: Level 3 PR Removal
	17: Gate Oxidation
	18: Photolith Level 4
	19: Level 4 Etch
	20: Level 4 PR Removal
	21: Photolith Level 5
	22: Evaporation
	23: Lift-off
	24: Anneal
	25: Testing

Electrical Testing

After fabrication, students perform wafer-level electrical testing to verify that they have working devices.

Electrical testing instructions are located here.