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ECE444: Theory and Fabrication of Integrated Circuits
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UTILITIES: DIFCAD
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DifCad.net: Diffusion Profile and Junction Calculator
Options
Number of points to plot
Plot Size
Diffusion Steps
Substrate
Select Dopant Type:
Select Dopant Species
Background Dopant Concentration x 10
Predep 1
Select Dopant Species
Temperature (°C)
Time (seconds)
Solid Solubility x 10
Boron/Phosphorus Boron Phosphorus
T (°C)  D (cm2/s) Nsl (cm-3) Nsl (cm-3)
900 1.5 x 10-15 3.7 x 1020 6.0 x 1020
950 6.6 x 10-15 3.9 x 1020 7.8 x 1020
1000 2.6 x 10-14 4.1 x 1020 1.0 x 1021
1050 9.3 x 10-14 4.3 x 1020 1.2 x 1021
1100 3.0 x 10-13 4.5 x 1020 1.4 x 1021
1150 9.1 x 10-13 4.8 x 1020 1.5 x 1021
1200 2.5 x 10-12 5.0 x 1020 1.5 x 1021
1250 6.5 x 10-12 5.2 x 1020 1.4 x 1021
1300 1.6 x 10-11 5.4 x 1020 1.1 x 1021
1350 3.7 x 10-11 5.7 x 1020 7.1 x 1020

© 2004, 2005: ECE444
Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign
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