Warning! This is an archived version of the 2006 site.
ece444:
Theory and Fabrication of Integrated Circuits
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Irvin Curves
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Graphs and Tables:
GT1 - N v ρ
GT2 - 4pp Correction a
GT3 - 4pp Correction k
GT4 - Dry Oxidation
GT5 - Wet Oxidation
GT6 - Steam Oxidation
GT7 - Oxide Color Chart
GT8 - SiO
2
Equations
GT9 - Trumbore Curves
GT10 - Si Diffusivity Data
GT11 - Goldsmith Curves
GT13 -
erfc
Table
GT14 - Properties of
erf
GT15 - Ion Implant Ranges
GT16 - BV for Diffused Junctions
GT19 - Physical Constants
GT20 - Vapor Pressure Curves
GT21 - Herman Mask Set
The GT section gives a preview image of the graph. Click on the image for a larger .pdf file.
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© 2004, 2005, 2006
Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign