Warning! This is an archived version of the 2006 site.
ece444:
Theory and Fabrication of Integrated Circuits
title
  Main | Project | Lecture | Lab | Recipe | Testing | Logsheets | GT Section | Utilities | News | Career | Search | Admin
  Safety Quiz | Safety | Manual | Schedule | Mask Set | Devices | Software | Equipment | Staff
Text version You are not logged in | Login 

Graphs and Tables:


  • Please select an item in the menu above

The ece444 laboratory contains a full array of silicon processing tools.

Student image

As a result of years of teaching excellence, the laboratory has acquired a full array of equipment, including:

  • Step and repeat projection aligners
  • High temperature furnaces
  • Evaporators
  • Wet etching hoods
  • an extensive array of metrology tools
  • Electrical test benches
UIUC Logo