Warning! This is an archived version of the 2006 site.
ece444:
Theory and Fabrication of Integrated Circuits
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Utilities: Grove.NET
Grove.NET
About Grove.NET
GROVE.net
Orientation:
100
111
Oxidation Type:
Dry
Wet
Steam
Initial Thickness (Å):
Temperature (°C):
Time (minutes):
Oxide thickness = 0Å
Silicon
Calculated Thickness:
0
Å
© 2004, 2005, 2006
Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign