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ece444:
Theory and Fabrication of Integrated Circuits
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Utilities: Irvin.NET
Irvin.NET
About Irvin.NET
IRVIN.net
Indiffusing Dopant Type
n
p
Diffusion Type
Predep (erfc)
Drive (Gaussian)
x
j
(μm)
buried layer x (μm)
N
surface
(cm
-3
)
N
c
(cm
-3
avg σ (Ω-cm)
-1
=
R
s
(Ω/sq) =
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Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign